Multilayer Integrated Film Bulk Acoustic Resonators by Yafei Zhang, Da Chen

Multilayer Integrated Film Bulk Acoustic Resonators

Yafei Zhang, Da Chen

154 pages missing pub info (editions)

nonfiction science technology informative medium-paced

Description

Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano ...

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